Invention Grant
- Patent Title: CMOS compatible fuse or resistor using self-aligned contacts
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Application No.: US15997154Application Date: 2018-06-04
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Publication No.: US10290633B2Publication Date: 2019-05-14
- Inventor: Veeraraghavan S. Basker , Kangguo Cheng , Theodorus E. Standaert , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/06 ; H01L23/525 ; H01L49/02 ; H01L29/66 ; H01L29/45 ; H01L21/8234 ; H01L21/768 ; H01L23/522 ; H01L29/06 ; H01L29/417 ; H01L23/528

Abstract:
A semiconductor device includes dummy gate structures formed on a dielectric layer over a substrate and forming a gap therebetween. A trench silicide structure is formed in the gap on the dielectric layer and extends longitudinally beyond the gap on end portions. The trench silicide structure forms a resistive element. Self-aligned contacts are formed through an interlevel dielectric layer and land on the trench silicide structure beyond the gap on the end portions.
Public/Granted literature
- US20180286856A1 CMOS COMPATIBLE FUSE OR RESISTOR USING SELF-ALIGNED CONTACTS Public/Granted day:2018-10-04
Information query
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