Invention Grant
- Patent Title: Surface texture measuring apparatus
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Application No.: US15433234Application Date: 2017-02-15
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Publication No.: US10295337B2Publication Date: 2019-05-21
- Inventor: Sadayuki Matsumiya , Shuichi Kamiyama , Hidemitsu Asano , Hiroshi Sakai , Hiromu Maie , Yoshihiko Takahashi , Masanori Arai , Ken Motohashi
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2016-034436 20160225
- Main IPC: G01B5/00
- IPC: G01B5/00 ; G01B5/06 ; G01B5/12 ; G01B11/06 ; G01B11/12 ; G01B11/24 ; G01B11/30

Abstract:
A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a θ axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.
Public/Granted literature
- US20170248415A1 SURFACE TEXTURE MEASURING APPARATUS Public/Granted day:2017-08-31
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