Invention Grant
- Patent Title: Treating arcs in a plasma process
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Application No.: US15668621Application Date: 2017-08-03
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Publication No.: US10297431B2Publication Date: 2019-05-21
- Inventor: Marcin Zelechowski , Piotr Lach
- Applicant: TRUMPF Huettinger Sp. z o. o.
- Applicant Address: PL Zielonka
- Assignee: TRUMPF Huettinger Sp. z o. o.
- Current Assignee: TRUMPF Huettinger Sp. z o. o.
- Current Assignee Address: PL Zielonka
- Agency: Fish & Richardson P.C.
- Priority: EP15461509 20150203
- Main IPC: G01R31/12
- IPC: G01R31/12 ; H01J37/24 ; H01J37/32 ; H01J37/34 ; H01J37/244

Abstract:
An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value.
Public/Granted literature
- US20170330737A1 Treating Arcs in a Plasma Process Public/Granted day:2017-11-16
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