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公开(公告)号：US20140320015A1
公开(公告)日：2014-10-30
申请号：US14325499
申请日：2014-07-08
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Pawel Ozimek , Rafal Bugyi , Robert Dziuba , Andrzej Klimczak , Marcin Zelechowski
IPC: H01J37/32
CPC classification number: H01J37/32064 , H01J37/32091 , H01J37/32174 , H01M10/42 , H01M10/425 , H01M10/4264 , H01M10/44 , H05H1/36 , Y02E60/12
Abstract: According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.
Abstract translation: 根据本发明的第一方面，通过等离子体处理电源电路来实现减少存储在负载中的电能或用于连接电源与负载的一个或多个引线中的电能，该等离子体处理电源电路包括与至少一个 导线用于启用/中断负载电源; 第一电气非线性装置; 与第一电气非线性装置串联布置的能量存储装置; 以及与所述能量存储装置可操作地连接的预充电电路，所述预充电电路被配置为在能量到所述负载的电力的同时将所述能量存储装置充电到预定的能量水平。
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Patent Agency Ranking
公开(公告)号：US20170287684A1
公开(公告)日：2017-10-05
申请号：US15626273
申请日：2017-06-19
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Cezary Gapiñski , Andrzej Gieraltowski , Adam Grabowski , Piotr Lach , Marcin Zelechowski
IPC: H01J37/32
CPC classification number: H01J37/32944
Abstract: Methods, apparatus and systems for detecting an arc during supplying a plasma process in a plasma chamber with a power are provided. An example plasma power supply includes: a DC source, an output signal generator, a first signal sequence measurement device for measuring a first signal sequence present between the DC source and the output signal generator, a second signal sequence measurement device for measuring a second signal sequence present at an output of the output signal generator, and a controller configured to generate a reference signal sequence based on one of the first and second signal sequences, to compare the reference signal sequence and the other of the first and second signal sequences that has not been used to determine the reference signal sequence, and to generate a detection signal if the reference signal sequence and the other of the first and second signal sequences cross.
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公开(公告)号：US20170330737A1
公开(公告)日：2017-11-16
申请号：US15668621
申请日：2017-08-03
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Marcin Zelechowski , Piotr Lach
IPC: H01J37/34 , H01J37/244 , G01R31/12 , H01J37/24
CPC classification number: H01J37/3476 , G01R31/1254 , H01J37/241 , H01J37/244 , H01J37/32944 , H01J37/3444 , H01J2237/0206 , H01J2237/24564 , H01J2237/3322
Abstract: An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value.
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公开(公告)号：US10297431B2
公开(公告)日：2019-05-21
申请号：US15668621
申请日：2017-08-03
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Marcin Zelechowski , Piotr Lach
IPC: G01R31/12 , H01J37/24 , H01J37/32 , H01J37/34 , H01J37/244
Abstract: An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value.
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公开(公告)号：US09818579B2
公开(公告)日：2017-11-14
申请号：US14325499
申请日：2014-07-08
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Pawel Ozimek , Rafal Bugyi , Robert Dziuba , Andrzej Klimczak , Marcin Zelechowski
CPC classification number: H01J37/32064 , H01J37/32091 , H01J37/32174 , H01M10/42 , H01M10/425 , H01M10/4264 , H01M10/44 , H05H1/36 , Y02E60/12
Abstract: According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.
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公开(公告)号：US10431437B2
公开(公告)日：2019-10-01
申请号：US15626273
申请日：2017-06-19
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Cezary Gapi{right arrow over (n)}ski , Andrzej Gieraltowski , Adam Grabowski , Piotr Lach , Marcin Zelechowski
IPC: H01J37/32
Abstract: Methods, apparatus and systems for detecting an arc during supplying a plasma process in a plasma chamber with a power are provided. An example plasma power supply includes: a DC source, an output signal generator, a first signal sequence measurement device for measuring a first signal sequence present between the DC source and the output signal generator, a second signal sequence measurement device for measuring a second signal sequence present at an output of the output signal generator, and a controller configured to generate a reference signal sequence based on one of the first and second signal sequences, to compare the reference signal sequence and the other of the first and second signal sequences that has not been used to determine the reference signal sequence, and to generate a detection signal if the reference signal sequence and the other of the first and second signal sequences cross.
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