Invention Grant
- Patent Title: Metal of ceramic material hardened pattern
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Application No.: US15433397Application Date: 2017-02-15
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Publication No.: US10303048B2Publication Date: 2019-05-28
- Inventor: Boon Teik Chan , Arjun Singh , Safak Sayan
- Applicant: IMEC VZW , KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC VZW,KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D
- Current Assignee: IMEC VZW,KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D
- Current Assignee Address: BE Leuven BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP16156539 20160219
- Main IPC: B32B7/00
- IPC: B32B7/00 ; G03F7/00 ; H01L21/033 ; H01L21/027

Abstract:
The present disclosure relates to a patterned structure, the structure comprising: i) a substrate, ii) a first layer on top of the substrate, comprising a filler material and a guiding material, wherein at least a top surface of the first layer comprises one or more zones of filler material and one or more zones of guiding material, and iii) a second layer on top of the first layer comprising a pattern of a first material, the pattern being either aligned or anti-aligned with the underlying one or more zones of guiding material; wherein the first material comprises a metal or a ceramic material and wherein the guiding material and the filler material either both comprise or both do not comprise the metal or ceramic material.
Public/Granted literature
- US20170242335A1 Metal or Ceramic Material Hardened Pattern Public/Granted day:2017-08-24
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