Invention Grant
- Patent Title: Projection exposure apparatus with at least one manipulator
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Application No.: US15827586Application Date: 2017-11-30
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Publication No.: US10303063B2Publication Date: 2019-05-28
- Inventor: Boris Bittner , Norbert Wabra , Martin von Hodenberg
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102012205096 20120329
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A projection exposure apparatus for microlithography includes a projection lens which includes a plurality of optical elements for imaging mask structures onto a substrate during an exposure process. The projection exposure apparatus also includes at least one manipulator configured to change, as part of a manipulator actuation, the optical effects of at least one of the optical elements within the projection lens by changing a state variable of the optical element along a predetermined travel. The projection exposure apparatus further includes an algorithm generator configured to generate a travel generating optimization algorithm, adapted to at least one predetermined imaging parameter, on the basis of the at least one predetermined imaging parameter.
Public/Granted literature
- US20180173100A1 PROJECTION EXPOSURE APPARATUS WITH AT LEAST ONE MANIPULATOR Public/Granted day:2018-06-21
Information query
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