Invention Grant
- Patent Title: Plasma processing apparatus having a baffle plate and a rectifying plate
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Application No.: US15212400Application Date: 2016-07-18
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Publication No.: US10304666B2Publication Date: 2019-05-28
- Inventor: Ryo Sasaki , Yusei Kuwabara
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2015-145124 20150722
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/50 ; C23C16/455

Abstract:
A plasma processing apparatus includes: a chamber; a placing table; an exhaust path provided around the placing table to surround the placing table, and configured to exhaust a gas within a processing space above the semiconductor wafer placed on the placing table; an exhaust device configured to exhaust the gas within the processing space through the exhaust path; a baffle plate having a plurality of through holes and provided between the processing space and the exhaust path to surround the placing table; and a rectifying plate provided around the placing table to surround the placing table within the exhaust path at a position farther from the processing space than the baffle plate, and forming an opening within the exhaust path to make a sectional area of a flow path within the exhaust path larger at a position farther from a position within the exhaust path connected to the exhaust device.
Public/Granted literature
- US20170025256A1 PLASMA PROCESSING APPARATUS Public/Granted day:2017-01-26
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