Invention Grant
- Patent Title: Semiconductor device with multigate transistor structure
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Application No.: US15838840Application Date: 2017-12-12
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Publication No.: US10304819B2Publication Date: 2019-05-28
- Inventor: Hyo Jin Kim , Kwan Young Chun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2017-0072391 20170609
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L29/66 ; H01L27/088 ; H01L29/423 ; H01L29/06 ; H01L21/8234

Abstract:
A semiconductor device includes a cell region that includes a first active region and a second active region extending in a first direction and a separation region between the first active region and the second active region. The cell region has a first width. A first gate structure and a second gate structure are disposed on the cell region, are spaced apart from each other in the first direction, and extend in the second direction. A first metal line and a second metal line are disposed on the cell region, extend in the first direction, and are spaced apart from each other by a first pitch. Each of the first and second metal lines has a second width. A first gate contact electrically connects the first gate structure and the first metal line. At least a portion of the first gate contact overlaps the separation region. A second gate contact electrically connects the second gate structure and the second metal line. At least a portion of the second gate contact overlaps the separation region. The first width divided by a sum of the first pitch and the second width is six or less.
Public/Granted literature
- US20180358346A1 SEMICONDUCTOR DEVICE WITH MULTIGATE TRANSISTOR STRUCTURE Public/Granted day:2018-12-13
Information query
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