Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US14960888Application Date: 2015-12-07
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Publication No.: US10304849B2Publication Date: 2019-05-28
- Inventor: Ryosuke Sawabe , Masaru Kito
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11582 ; H01L27/11565 ; H01L27/1157

Abstract:
A semiconductor memory device according to an embodiment includes: an insulating layer; a conductive layer stacked above the insulating layer in a first direction, the conductive layer having a second direction as a longitudinal direction and a third direction as a short direction; and a channel semiconductor layer extending in the first direction, and the conductive layer including a recessed portion narrowed in the third direction.
Public/Granted literature
- US20170077119A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-03-16
Information query
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