Invention Grant
- Patent Title: Laser micromachining with tailored bursts of short laser pulses
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Application No.: US12413350Application Date: 2009-03-27
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Publication No.: US10307862B2Publication Date: 2019-06-04
- Inventor: Yunlong Sun
- Applicant: Yunlong Sun
- Applicant Address: US OR Portland
- Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC
- Current Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC
- Current Assignee Address: US OR Portland
- Main IPC: H01S3/098
- IPC: H01S3/098 ; H01S3/10 ; B23K26/0622 ; B23K26/40 ; B23K103/10 ; B23K103/12 ; B23K103/16 ; B23K103/00

Abstract:
A series of laser pulse bundles or bursts are used for micromachining target structures. Each burst includes short laser pulses with temporal pulse widths that are less than approximately 1 nanosecond. A laser micromachining method includes generating a burst of laser pulses and adjusting an envelope of the burst of laser pulses for processing target locations. The method includes adjusting the burst envelope by selectively adjusting one or more first laser pulses within the burst to a first amplitude based on processing characteristics of a first feature at a target location, and selectively adjusting one or more second laser pulses within the burst to a second amplitude based on processing characteristics of a second feature at the target location. The method further includes directing the amplitude adjusted burst of laser pulses to the target location.
Public/Granted literature
- US20100246611A1 LASER MICROMACHINING WITH TAILORED BURSTS OF SHORT LASER PULSES Public/Granted day:2010-09-30
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