Invention Grant
- Patent Title: Filling material for three-dimensional mounting of semiconductor element
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Application No.: US15024910Application Date: 2014-09-25
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Publication No.: US10308758B2Publication Date: 2019-06-04
- Inventor: Hiroki Tanaka , Katsuhiro Nakaguchi
- Applicant: DAICEL CORPORATION
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: DAICEL CORPORATION
- Current Assignee: DAICEL CORPORATION
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2013-201591 20130927
- International Application: PCT/JP2014/075433 WO 20140925
- International Announcement: WO2015/046334 WO 20150402
- Main IPC: C08G59/24
- IPC: C08G59/24 ; H01L23/538 ; H01L23/00 ; H01L25/065 ; H01L21/56 ; C08G59/22 ; C08G59/40 ; C08K3/36 ; C08K5/5425 ; H01L23/29 ; H01L23/31 ; C08G59/68 ; C08L63/00 ; H01L21/78

Abstract:
Provided are a filling component useful for the production of a thin, low-profile three-dimensional integrated semiconductor device via a COW process, and a curable composition for the formation of the filling component. The filling component according to the present invention for three-dimensional mounting of semiconductor elements is used to fill gaps between laterally adjacent semiconductor elements in the production of a three-dimensional integrated semiconductor device by stacking and integrating semiconductor elements. The filling component is a component that is polished and/or ground flat from the front side of semiconductor elements while gaps between the semiconductor elements are filled with the filling component.
Public/Granted literature
- US20160237201A1 FILLING MATERIAL FOR THREE-DIMENSIONAL MOUNTING OF SEMICONDUCTOR ELEMENT Public/Granted day:2016-08-18
Information query
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