Invention Grant
- Patent Title: Application of bottom purge to increase clean efficiency
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Application No.: US15917079Application Date: 2018-03-09
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Publication No.: US10312076B2Publication Date: 2019-06-04
- Inventor: Kalyanjit Ghosh , Sanjeev Baluja , Mayur G. Kulkarni
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01J37/32 ; C23C16/455 ; C23C16/44 ; C23C16/40 ; C23C16/458 ; C23C16/50

Abstract:
Apparatus and methods for depositing a film in a PECVD chamber while simultaneously flowing a purge gas from beneath a substrate support are provided herein. In embodiments disclosed herein, a combined gas exhaust volume circumferentially disposed about the substrate support, below a first volume and above a second volume, draws processing gases from the first volume down over an edge of a first surface of the substrate support and simultaneously draws purge gases from the second volume upward over an edge of a second surface of the substrate support. The gases are than evacuated from the combined exhaust volume through an exhaust port fluidly coupled to a vacuum source.
Public/Granted literature
- US20180261453A1 NOVEL APPLICATION OF BOTTOM PURGE TO INCREASE CLEAN EFFICIENCY Public/Granted day:2018-09-13
Information query
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