- Patent Title: Delivery device, manufacturing system and process of manufacturing
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Application No.: US14946115Application Date: 2015-11-19
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Publication No.: US10316408B2Publication Date: 2019-06-11
- Inventor: David A. Smith , Min Yuan , James B. Mattzela , Olaf Martin Wurzinger , Dietmar Keiper , Anna Katharina Haab
- Applicant: SILCOTEK CORP. , AIXTRON SE
- Applicant Address: US PA Bellefonte DE Herzogenrath
- Assignee: SilcoTek Corp.,AIXTRON SE
- Current Assignee: SilcoTek Corp.,AIXTRON SE
- Current Assignee Address: US PA Bellefonte DE Herzogenrath
- Agency: McNees Wallace & Nurick LLC
- Main IPC: C23C16/24
- IPC: C23C16/24 ; C23C16/44

Abstract:
A delivery device, manufacturing system, and process of manufacturing are disclosed. The delivery device includes a feed tube and a chemical vapor deposition coating applied over an inner surface of the feed tube, the chemical vapor deposition coating being formed from decomposition of dimethylsilane. The manufacturing system includes the delivery device and a chamber in selective fluid communication with the delivery device. The process of manufacturing uses the manufacturing system to produce an article.
Public/Granted literature
- US20160168697A1 DELIVERY DEVICE, MANUFACTURING SYSTEM AND PROCESS OF MANUFACTURING Public/Granted day:2016-06-16
Information query
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