Invention Grant
- Patent Title: Rule-based deployment of assist features
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Application No.: US15512540Application Date: 2015-09-23
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Publication No.: US10331039B2Publication Date: 2019-06-25
- Inventor: Duan-Fu Stephen Hsu , Kurt E. Wampler
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2015/071861 WO 20150923
- International Announcement: WO2016/050584 WO 20160407
- Main IPC: G03F1/36
- IPC: G03F1/36 ; G03F7/20

Abstract:
Methods of reducing a pattern displacement error, contrast loss, best focus shift, and/or tilt of a Bossung curve, of a portion of a design layout used in a patterning process for imaging that portion onto a substrate using a lithographic apparatus. The methods include determining or adjusting one or more characteristics of one or more assist features using one or more rules based on one or more parameters selected from: one or more characteristics of one or more design features in the portion, one or more characteristics of the patterning process, one or more characteristics of the lithographic apparatus, and/or a combination selected from the foregoing.
Public/Granted literature
- US20170329235A1 RULE-BASED DEPLOYMENT OF ASSIST FEATURES Public/Granted day:2017-11-16
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