Warp correction apparatus for plate-like workpiece and warp correction method
Abstract:
A warp correction apparatus includes an elastic mat, a first sheet supply unit which supplies a first clean sheet on the elastic mat, a workpiece holding mechanism which supplies the plate-like workpiece (a frame unit) on the first clean sheet, a second sheet supply unit which supplies a second clean sheet above the first clean sheet, a pressure roller, a first elevator unit which moves the second clean sheet up and down, a second elevator unit which presses the pressure roller toward the elastic mat, and a roller moving mechanism. The pressure roller is moved along an upper surface of the elastic mat by the roller moving mechanism while the frame unit is sandwiched between the elastic mat and the pressure roller.
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