Warp correction apparatus for plate-like workpiece and warp correction method

    公开(公告)号:US10332551B2

    公开(公告)日:2019-06-25

    申请号:US14869097

    申请日:2015-09-29

    Abstract: A warp correction apparatus includes an elastic mat, a first sheet supply unit which supplies a first clean sheet on the elastic mat, a workpiece holding mechanism which supplies the plate-like workpiece (a frame unit) on the first clean sheet, a second sheet supply unit which supplies a second clean sheet above the first clean sheet, a pressure roller, a first elevator unit which moves the second clean sheet up and down, a second elevator unit which presses the pressure roller toward the elastic mat, and a roller moving mechanism. The pressure roller is moved along an upper surface of the elastic mat by the roller moving mechanism while the frame unit is sandwiched between the elastic mat and the pressure roller.

    Warp correction apparatus for plate-like workpiece and warp correction method

    公开(公告)号:US11152022B2

    公开(公告)日:2021-10-19

    申请号:US16400060

    申请日:2019-05-01

    Abstract: A correction method includes a correction process for correcting warping of a plate-like workpiece including a frame portion and a plurality of flexure elements formed within the frame portion. The correction process includes arranging a first clean sheet on an elastic mat having a flat upper surface, supplying the plate-like workpiece on the first clean sheet, overlaying a second clean sheet from above the first clean sheet and the plate-like workpiece, lowering a pressure roller toward the elastic mat from above the second clean sheet, sandwiching the plate-like workpiece between the elastic mat and the pressure roller, moving the pressure roller along an upper surface of the elastic mat while having the plate-like workpiece sandwiched between the elastic mat and the pressure roller, and taking out the plate-like workpiece from the first clean sheet.

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