Invention Grant
- Patent Title: Solid-state imaging device and manufacturing method of the same, and electronic apparatus
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Application No.: US15719179Application Date: 2017-09-28
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Publication No.: US10332922B2Publication Date: 2019-06-25
- Inventor: Yuki Miyanami
- Applicant: SONY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: JP2012-011125 20120123
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/357 ; H04N5/376 ; H04N5/378 ; H04N5/225 ; H04N9/04

Abstract:
The present disclosure relates to a solid-state imaging device and a manufacturing method of the same, and an electronic apparatus, capable of more reliably suppressing occurrence of color mixing. A trench is formed between PDs so as to be opened to a light receiving surface side of a semiconductor substrate on which a plurality of the PDs, each of which receives light to generate charges, are formed, an insulating film is embedded in the trench and the insulating film is laminated on a back surface side of the semiconductor substrate. Then, a light shielding portion is formed so as to be laminated on the insulating film and to have a convex shape protruding to the semiconductor substrate at a location corresponding to the trench. The present technology can be applied to a back surface irradiation type CMOS solid-state imaging device.
Public/Granted literature
- US20180019276A1 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD OF THE SAME, AND ELECTRONIC APPARATUS Public/Granted day:2018-01-18
Information query
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