Invention Grant
- Patent Title: Substrates having an antireflection layer and methods of forming an antireflection layer
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Application No.: US15033142Application Date: 2014-10-30
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Publication No.: US10333008B2Publication Date: 2019-06-25
- Inventor: Peng Jiang , Khalid Askar , Jiamin Wang , Christopher Kim
- Applicant: University of Florida Research Foundation, Inc.
- Applicant Address: US FL Gainesville
- Assignee: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- Current Assignee: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
- Current Assignee Address: US FL Gainesville
- Agency: Thomas Horstemeyer, LLP
- International Application: PCT/US2014/063163 WO 20141030
- International Announcement: WO2015/116267 WO 20150806
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0216 ; H01L31/0236
Abstract:
Embodiments of the present disclosure provide for methods of making substrates having an antireflective layer, substrates having an antireflective layer, devices including a substrate having an antireflective layer, and the like.
Public/Granted literature
- US20160254395A1 SUBSTRATES HAVING AN ANTIREFLECTION LAYER AND METHODS OF FORMING AN ANTIREFLECTION LAYER Public/Granted day:2016-09-01
Information query
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