Invention Grant
- Patent Title: High speed vacuum cycling excitation system for optical inspection systems
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Application No.: US15629673Application Date: 2017-06-21
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Publication No.: US10337969B2Publication Date: 2019-07-02
- Inventor: Morteza Safai , Xiaoxi Wang
- Applicant: The Boeing Company
- Applicant Address: US IL Chicago
- Assignee: THE BOEING COMPANY
- Current Assignee: THE BOEING COMPANY
- Current Assignee Address: US IL Chicago
- Agency: MH2 Technology Law Group LLP
- Main IPC: G01N3/32
- IPC: G01N3/32 ; G01N3/24 ; G01B11/16 ; G01N3/60 ; G01N19/04

Abstract:
A vacuum system and method for inspecting a workpiece that can include use of the vacuum system, where the vacuum system can include a housing defining at least a portion of a vacuum chamber, a piston within the housing that oscillates to vary a volume of the vacuum chamber, a first valve and a second valve in fluid communication with the vacuum chamber, and a hood in fluid communication with the second valve and the vacuum chamber. The vacuum system can include high-speed valves that enable vacuum system cycling and thus vacuum pressure cycling at a rapid frequency.
Public/Granted literature
- US20180372603A1 HIGH SPEED VACUUM CYCLING EXCITATION SYSTEM FOR OPTICAL INSPECTION SYSTEMS Public/Granted day:2018-12-27
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