Invention Grant
- Patent Title: System for handling semiconductor dies
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Application No.: US15290234Application Date: 2016-10-11
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Publication No.: US10340173B2Publication Date: 2019-07-02
- Inventor: Andy E. Hooper
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67

Abstract:
Systems and methods for releasing semiconductor devices during pick and place operations are disclosed. A representative system for handling semiconductor dies comprises a support member positioned to carry at least one semiconductor die releasably attached to a support substrate. The system further includes a picking device having a pick head coupleable to a vacuum source and positioned to releasably attach to the semiconductor die at a pick station. The system still further incudes a release station having a fluid delivery device coupleable to a source of release fluid, the fluid delivery device having an exit positioned to direct release fluid toward a semiconductor die carried by the support member at the release station.
Public/Granted literature
- US20180102273A1 SEMICONDUCTOR DEVICE RELEASE DURING PICK AND PLACE OPERATIONS, AND ASSOCIATED SYSTEMS AND METHODS Public/Granted day:2018-04-12
Information query
IPC分类: