Invention Grant
- Patent Title: Merge mandrel features
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Application No.: US15872314Application Date: 2018-01-16
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Publication No.: US10340180B1Publication Date: 2019-07-02
- Inventor: Hsueh-Chung Chen , Martin J. O'Toole , Terry A. Spooner , Jason E. Stephens
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L21/033 ; H01L23/532

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to merged mandrel lines and methods of manufacture. The structure includes: at least one metal line having a first dimension in a self-aligned double patterning (SADP) line array; and at least one metal line having a second dimension inserted into the SADP line array, the second dimension being different than the first dimension.
Public/Granted literature
- US20190221474A1 MERGE MANDREL FEATURES Public/Granted day:2019-07-18
Information query
IPC分类: