- 专利标题: Method for producing a semiconductor device
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申请号: US16230151申请日: 2018-12-21
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公开(公告)号: US10340184B2公开(公告)日: 2019-07-02
- 发明人: Fujio Masuoka , Hiroki Nakamura
- 申请人: Unisantis Electronics Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Brinks Gilson & Lione
- 优先权: WOPCTJP2014072563 20140828
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/768 ; H01L29/78 ; H01L29/66
摘要:
A method for producing a semiconductor device includes depositing a first oxide insulating film containing an impurity of a first conductivity type on a fourth first-conductivity-type semiconductor layer formed on a substrate; depositing a sixth insulating nitride film; depositing a second oxide insulating film containing an impurity of the first conductivity type; depositing a seventh insulating nitride film; depositing a third oxide insulating film containing an impurity of the first conductivity type; etching the first insulating film, the sixth insulating film, the second insulating film, and the seventh insulating film to form a contact hole; forming a first pillar-shaped silicon layer in the contact hole by epitaxial growth; removing the sixth insulating film and the seventh insulating film; forming a first gate and a second gate; and forming a contact connecting the first gate and the second gate.
公开/授权文献
- US20190148228A1 METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE 公开/授权日:2019-05-16