Invention Grant
- Patent Title: Frequency and match tuning in one state and frequency tuning in the other state
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Application No.: US15975072Application Date: 2018-05-09
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Publication No.: US10340915B2Publication Date: 2019-07-02
- Inventor: Ying Wu
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H03K19/003
- IPC: H03K19/003 ; H04B1/10 ; H04B1/7136 ; H01L21/02
Abstract:
Systems and methods for frequency and match tuning in one state S1 and frequency tuning in another state S2 are described. The systems and methods include determining one or more variables for the states S1 and S2, and tuning a frequency for the state S1 of a radio frequency (RF) generator based on the one or more variables.
Public/Granted literature
- US20180262196A1 Frequency and Match Tuning in One State and Frequency Tuning in the Other State Public/Granted day:2018-09-13
Information query
