Invention Grant
- Patent Title: Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same
-
Application No.: US15468066Application Date: 2017-03-23
-
Publication No.: US10343897B2Publication Date: 2019-07-09
- Inventor: Julius Ming-Lin Tsai , Baris Cagdaser , Martin Lim , Aleksey S. Khenkin
- Applicant: INVENSENSE, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: B81B7/02
- IPC: B81B7/02 ; B81C1/00 ; H04R1/04 ; H04R29/00 ; H04R19/04

Abstract:
An integrated package of at least one environmental sensor and at least one MEMS acoustic sensor is disclosed. The package contains a shared port that exposes both sensors to the environment, wherein the environmental sensor measures characteristics of the environment and the acoustic sensor measures sound waves. The port exposes the environmental sensor to an air flow and the acoustic sensor to sound waves. An example of the acoustic sensor is a microphone and an example of the environmental sensor is a humidity sensor.
Public/Granted literature
Information query