- 专利标题： Method for manufacturing workpieces and apparatus
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申请号： US14452883申请日： 2014-08-06
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公开(公告)号： US10347515B2公开(公告)日： 2019-07-09
- 发明人: Bernd Heinz
- 申请人： Oerlikon Advanced Technologies AG
- 申请人地址： CH Trübbach
- 专利权人： EVATEC AG
- 当前专利权人： EVATEC AG
- 当前专利权人地址： CH Trübbach
- 代理机构： Pearne & Gordon LLP
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/677 ; H01L21/687
摘要：
For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.
公开/授权文献
- US20140345518A1 METHOD FOR MANUFACTURING WORKPIECES AND APPARATUS 公开/授权日：2014-11-27
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