Invention Grant
- Patent Title: Structure for radio-frequency applications
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Application No.: US15500721Application Date: 2015-07-03
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Publication No.: US10347597B2Publication Date: 2019-07-09
- Inventor: Oleg Kononchuk , William Van Den Daele , Eric Desbonnets
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1401800 20140801
- International Application: PCT/FR2015/051854 WO 20150703
- International Announcement: WO2016/016532 WO 20160204
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H03H3/08 ; H01L23/66 ; H01L41/04 ; H01L21/306 ; H01L21/762

Abstract:
A structure for radiofrequency applications includes: a support substrate of high-resistivity silicon comprising a lower part and an upper part having undergone a p-type doping to a depth D; a mesoporous trapping layer of silicon formed in the doped upper part of the support substrate. The depth D is less than 1 micron and the trapping layer has a porosity rate of between 20% and 60%.
Public/Granted literature
- US20170221839A1 STRUCTURE FOR RADIO-FREQUENCY APPLICATIONS Public/Granted day:2017-08-03
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