Invention Grant
- Patent Title: Methods of forming bottom and top source/drain regions on a vertical transistor device
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Application No.: US15268751Application Date: 2016-09-19
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Publication No.: US10347745B2Publication Date: 2019-07-09
- Inventor: Puneet Harischandra Suvarna , Steven J. Bentley , Daniel Chanemougame
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/00 ; H01L29/08 ; H01L29/165

Abstract:
One illustrative method disclosed herein includes, among other things, forming a vertically oriented channel semiconductor structure above a substrate, performing an epi deposition process to simultaneously form at least a portion of a bottom source/drain region and at least a portion of a top source/drain region during the epi deposition process and, after performing the epi deposition process, forming a gate structure around a portion of the vertically oriented channel semiconductor structure.
Public/Granted literature
- US20180083121A1 METHODS OF FORMING BOTTOM AND TOP SOURCE/DRAIN REGIONS ON A VERTICAL TRANSISTOR DEVICE Public/Granted day:2018-03-22
Information query
IPC分类: