Invention Grant
- Patent Title: Coefficient-of-thermal-expansion measurement method of dimension reference gauge, measuring device for coefficient of thermal expansion and reference gauge
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Application No.: US15271593Application Date: 2016-09-21
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Publication No.: US10352678B2Publication Date: 2019-07-16
- Inventor: Yuichiro Yokoyama , Takeshi Hagino , Yutaka Kuriyama
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kawasaki
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki
- Agency: Oliff PLC
- Priority: JP2015-188093 20150925; JP2015-215240 20151030; JP2015-215241 20151030
- Main IPC: G01B5/008
- IPC: G01B5/008 ; G01N25/16
Abstract:
A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
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