公开(公告)号：US20160018215A1

公开(公告)日：2016-01-21

申请号：US14800110

申请日：2015-07-15

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi Hagino ,  Yuichiro Yokoyama ,  Yutaka Kuriyama

IPC: G01B11/24 ,  G01B9/02

Abstract: In a spherical shape measurement method for measuring a surface shape, a sphere to be measured is made freely rotatable. The partial spherical shape of each measurement area, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. In the state of detaching the sphere from the sphere hold mechanism to which the sphere is freely attachable and detachable, the sphere support table holds the sphere. The sphere is re-held at a different position, so that the shape of the entire sphere can be measured with high accuracy.

Abstract translation: 在用于测量表面形状的球形测量方法中，可以使待测球体自由旋转。 在每个旋转位置测量每个测量区域的局部球形，其被建立为具有与彼此相邻的另一测量区域重叠的区域，并且通过将测量的部分球形形状 基于重叠区域的形状的缝合操作的区域。 在从球体保持机构分离球体的状态下，球体可自由地附接和分离，球支撑台保持球体。 球体被重新保持在不同的位置，从而可以高精度地测量整个球体的形状。

公开(公告)号：US11378386B2

公开(公告)日：2022-07-05

申请号：US17160992

申请日：2021-01-28

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro Yokoyama

IPC: G01B9/02 ,  G01B11/02 ,  G02B27/28 ,  G01B9/02017

Abstract: A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.

公开(公告)号：US11353315B2

公开(公告)日：2022-06-07

申请号：US17197349

申请日：2021-03-10

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro Yokoyama

IPC: G01B9/02003 ,  G01B9/02015 ,  G02B27/10

Abstract: A laser interference device includes a measurement laser that outputs a laser beam, a beam splitter that divides the laser beam into a measurement laser beam and a frequency monitor laser beam, a reference laser that outputs a reference laser beam, a frequency detector that detects a beat frequency resulting from interference between the reference laser beam and the frequency monitor laser beam, a wavelength calculator that calculates a wavelength of the frequency monitor laser beam (a wavelength measurement value) on the basis of the beat frequency, a light detector that detects an interference light of the measurement light and the reference light of the measurement laser beam and outputs a light detection signal, and a displacement calculator that calculates a displacement of the measurement mirror by performing an arithmetic process based on the wavelength measurement value and the light detection signal.

公开(公告)号：US10969355B2

公开(公告)日：2021-04-06

申请号：US16040779

申请日：2018-07-20

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro Yokoyama ,  Takeshi Hagino

IPC: G01N25/16 ,  G01B11/16 ,  G01B21/00

Abstract: A coefficient-of-thermal-expansion measuring device includes: a temperature detector detecting an object's temperature; an optical interferometer measuring an object's length using single-wavelength light; an actual data acquiring unit changing the object's temperature to temperatures and acquiring actual data of the length measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data for each actual data by setting an order of interference within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data, the data sets having different combinations of selection of the pieces of verification data; and a judging unit calculating a linear approximation function for each data set, and judging, using an evaluation index value based on differences of the verification data in each data set from the linear approximation function, applicability of each data set.

公开(公告)号：US20160018216A1

公开(公告)日：2016-01-21

申请号：US14800230

申请日：2015-07-15

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi Hagino ,  Yuichiro Yokoyama

IPC: G01B11/24 ,  G01B9/02

CPC classification number: G01B11/2441 ,  G01B5/0004 ,  G01B9/02039 ,  G01B9/02041 ,  G01B2210/52

Abstract: A partial spherical shape of each measurement area of a sphere to be measured, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. The position at which the sphere is measured is changed and re-held. A positional displacement between half parts of the sphere before and after re-holding, which is caused by an effect of an error owing to the re-holding, is separated into three rotational components. Magnitudes of the three rotational components are quantified by image correlation and the positional displacement corrected. Then, the stitching operation is performed to measure the entire part of the sphere surface.

Abstract translation: 在每个旋转位置处测量在每个旋转位置处测量被建立为具有与彼此相邻的另一测量区域重叠的区域的待测量球体的每个测量区域的局部球形，并且通过将 通过基于重叠区域的形状的缝合操作来测量区域的局部球形。 测量球体的位置被改变和重新保持。 在由重新保持引起的误差的影响引起的重新保持前后的球体的半部分之间的位置偏移被分成三个旋转分量。 通过图像相关性校正三个旋转分量的量值，并校正位置位移。 然后，执行缝合操作以测量球体表面的整个部分。

公开(公告)号：US20140130363A1

公开(公告)日：2014-05-15

申请号：US14079782

申请日：2013-11-14

Applicant: Mitutoyo Corporation

Inventor： Takeshi Hagino ,  Yuichiro Yokoyama ,  Yutaka Kuriyama

IPC: G01B5/22

CPC classification number: G01B5/22 ,  G01B5/0004 ,  G01B5/201

Abstract: A spherical-form measuring apparatus includes a turntable 5, a holding unit 10 for holding the sphere 20, and a probe 6 for measuring a contour of a sphere part 22 of the sphere 20. The holding unit 10 includes a base part 12, a vertical holding part 14 and an inclined holding part 16 which are placed at separate positions on the base part 12. The vertical holding part 14 holds the stem part 24 of the sphere 20 with it set in a direction perpendicular to the turntable 5. The inclined holding part 16 holds the stem part 24 with it set in a direction at an angle. The vertical and inclined holding part 14, 16 are disposed such that their axial lines meet at an intersection point P and such that the distance from the point P to the vertical holding part 14 agrees with the distance from the point P to the inclined holding part 16.

Abstract translation: 球形测量装置包括转台5，用于保持球体20的保持单元10和用于测量球体20的球体部分22的轮廓的探针6.保持单元10包括基部12， 垂直保持部14和倾斜保持部16，其设置在基部12上的分离位置。垂直保持部14将球体20的杆部24保持在与转台5垂直的方向。倾斜 保持部16将杆部24保持在一定角度的方向。 垂直倾斜保持部14,16被设置为使得它们的轴线在交点P处相交，使得从点P到垂直保持部14的距离与从点P到倾斜保持部分的距离一致 16。

公开(公告)号：US10900917B2

公开(公告)日：2021-01-26

申请号：US16040946

申请日：2018-07-20

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro Yokoyama ,  Takeshi Hagino

IPC: G01N25/16

Abstract: A coefficient-of-thermal-expansion measuring device includes temperature control device, optical interferometer, and control device including: an actual data acquiring unit sequentially changing an object's temperature and acquiring actual data measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data by setting an order of interference of the actual data within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data at each temperature; and a judging unit deriving approximation functions with different orders from each data set, determining an evaluation index value based on differences of verification data from each approximation function, selecting a candidate data set with the smallest evaluation index value for each approximation function, and determining whether the candidate data set is the same for each approximation function to judge applicability of the candidate data set.

公开(公告)号：US10444008B2

公开(公告)日：2019-10-15

申请号：US14800110

申请日：2015-07-15

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi Hagino ,  Yuichiro Yokoyama ,  Yutaka Kuriyama

IPC: G01B11/24 ,  G01B9/02 ,  G01B5/00

Abstract: In a spherical shape measurement method for measuring a surface shape, a sphere to be measured is made freely rotatable. The partial spherical shape of each measurement area, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. In the state of detaching the sphere from the sphere hold mechanism to which the sphere is freely attachable and detachable, the sphere support table holds the sphere. The sphere is re-held at a different position, so that the shape of the entire sphere can be measured with high accuracy.

公开(公告)号：US10352678B2

公开(公告)日：2019-07-16

申请号：US15271593

申请日：2016-09-21

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro Yokoyama ,  Takeshi Hagino ,  Yutaka Kuriyama

IPC: G01B5/008 ,  G01N25/16

Abstract: A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.

公开(公告)号：US09518944B2

公开(公告)日：2016-12-13

申请号：US14295781

申请日：2014-06-04

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro Yokoyama ,  Takeshi Hagino

IPC: G01N25/16 ,  G01N1/44

CPC classification number: G01N25/16 ,  G01N1/44

Abstract: A temperature-controlled bath capable of swiftly changing the temperature of a sample to a target temperature and maintaining the temperature of the sample at a fixed temperature after the temperature change is provided. A temperature-controlled bath includes a temperature changing means, a temperature-controlled chamber, a sample holding chamber, and connection cut-off means. The temperature changing means is disposed in the temperature-controlled chamber, and the temperature of the temperature-controlled chamber is adjusted by the temperature changing means. The sample holding chamber is separated from the temperature-controlled chamber by a thermally conducive wall, and contains a sample therein. The connection cut-off means change a connection between the temperature-controlled chamber and the sample holding chamber to a connected state or a cut-off state.

Abstract translation: 提供能够迅速将样品温度改变到目标温度并且在温度变化之后将样品温度保持在固定温度的温度控制浴。 温度控制浴包括温度改变装置，温度控制室，样品保持室和连接切断装置。 温度调节装置设置在温度控制室中，温度控制室的温度由温度变化装置调节。 样品保持室通过热导壁从温度控制室分离，并在其中包含样品。 连接切断装置将温度控制室和样品保持室之间的连接改变为连接状态或截止状态。