Invention Grant
- Patent Title: Focusing modules and methods
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Application No.: US14965464Application Date: 2015-12-10
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Publication No.: US10352766B1Publication Date: 2019-07-16
- Inventor: Barry Loevsky , Ari Krauss , Avraham Bakal
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01J1/00
- IPC: G01J1/00 ; G01J1/42 ; G02F1/135 ; G02B26/08 ; G02B26/04

Abstract:
Focusing modules and methods are provided, which use a spatial light modulator (SLM) configured to yield a circumferentially sinusoidal pattern to derive focusing signals. For example, the SLM may comprise an optical chopper wheel made of a glass disc with a circumferentially sinusoidal pattern. The circumferentially sinusoidal pattern simplifies phase derivation from the focusing signal, providing a faster and more accurate estimation of defocusing. Signal detection may be carried out by a diode array that provides a more accurate signal faster, as well as a more differentiated analysis of the focusing signal than the one available by current technology.
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