Invention Grant
- Patent Title: Manufacturing method for integrated multilayer magnetoresistive sensor
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Application No.: US15013562Application Date: 2016-02-02
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Publication No.: US10353020B2Publication Date: 2019-07-16
- Inventor: Dario Paci , Sarah Zerbini , Benedetto Vigna
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: ITTO2012A0614 20120711
- Main IPC: G01R33/00
- IPC: G01R33/00 ; G01R33/09 ; G01R33/02

Abstract:
A method of manufacturing a magnetic-field sensor includes forming an insulating layer on a first surface of a substrate. First and second magnetoresistors are formed at different above the first surface of the substrate and are spaced apart from the first surface by different distances. The first and second magnetoresistors have respective main axes of magnetization transverse to one another, and respective secondary axes of magnetization transverse to one another. The method further includes forming a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor, and forming a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor.
Public/Granted literature
- US20160154067A1 INTEGRATED MULTILAYER MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-06-02
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