Invention Grant
- Patent Title: Lithographic reticle system
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Application No.: US15979813Application Date: 2018-05-15
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Publication No.: US10353284B2Publication Date: 2019-07-16
- Inventor: Rik Jonckheere , Cedric Huyghebaert , Emily Gallagher
- Applicant: IMEC VZW , Imec USA Nanoelectronics Design Center
- Applicant Address: BE Leuven US FL Kissimmee
- Assignee: IMEC VZW,IMEC USA NANOELECTRONICS DESIGN CENTER
- Current Assignee: IMEC VZW,IMEC USA NANOELECTRONICS DESIGN CENTER
- Current Assignee Address: BE Leuven US FL Kissimmee
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP17171170 20170515
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/64 ; G03F1/62

Abstract:
The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second pellicle membrane mounted in front of the first pellicle membrane, wherein the first pellicle membrane is arranged between the reticle and the second pellicle membrane, and wherein the second pellicle membrane is releasably mounted in relation to the first pellicle membrane and the reticle.
Public/Granted literature
- US20180329290A1 Lithographic Reticle System Public/Granted day:2018-11-15
Information query
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