- 专利标题: Lithographic reticle system
-
申请号: US15979813申请日: 2018-05-15
-
公开(公告)号: US10353284B2公开(公告)日: 2019-07-16
- 发明人: Rik Jonckheere , Cedric Huyghebaert , Emily Gallagher
- 申请人: IMEC VZW , Imec USA Nanoelectronics Design Center
- 申请人地址: BE Leuven US FL Kissimmee
- 专利权人: IMEC VZW,IMEC USA NANOELECTRONICS DESIGN CENTER
- 当前专利权人: IMEC VZW,IMEC USA NANOELECTRONICS DESIGN CENTER
- 当前专利权人地址: BE Leuven US FL Kissimmee
- 代理机构: McDonnell Boehnen Hulbert & Berghoff LLP
- 优先权: EP17171170 20170515
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F1/64 ; G03F1/62
摘要:
The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second pellicle membrane mounted in front of the first pellicle membrane, wherein the first pellicle membrane is arranged between the reticle and the second pellicle membrane, and wherein the second pellicle membrane is releasably mounted in relation to the first pellicle membrane and the reticle.
公开/授权文献
- US20180329290A1 Lithographic Reticle System 公开/授权日:2018-11-15
信息查询
IPC分类: