Invention Grant
- Patent Title: Method and apparatus for generating a predetermined three-dimensional contour of an optical component and/or a wafer
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Application No.: US15272936Application Date: 2016-09-22
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Publication No.: US10353295B2Publication Date: 2019-07-16
- Inventor: Vladimir Dmitriev , Bernd Geh
- Applicant: Carl Zeiss SMS Ltd. , Carl Zeiss SMT GmbH
- Applicant Address: IL D.N. Misgav DE Oberkochen
- Assignee: Carl Zeiss SMS Ltd.,Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMS Ltd.,Carl Zeiss SMT GmbH
- Current Assignee Address: IL D.N. Misgav DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03F1/72
- IPC: G03F1/72 ; G03F7/20 ; G03F1/60 ; G03F7/00 ; G21K1/06 ; H01L21/66 ; B82Y40/00

Abstract:
A method for generating a predetermined three-dimensional contour of a component and/or a wafer comprises: (a) determining a deviation of an existing three-dimensional contour of the component and/or the wafer from the predetermined three-dimensional contour; (b) calculating at least one three-dimensional arrangement of laser pulses having one or more parameter sets defining the laser pulses for correcting the determined existing deviation of the three-dimensional contour from the predetermined three-dimensional contour; and (c) applying the calculated at least one three-dimensional arrangement of laser pulses on the component and/or the wafer for generating the predetermined three-dimensional contour.
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