Invention Grant
- Patent Title: Nanowire bundle and method of manufacturing nanostructure
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Application No.: US15730376Application Date: 2017-10-11
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Publication No.: US10354869B2Publication Date: 2019-07-16
- Inventor: Dae Hyun Kim , Jong Hyuk Kang , Hyun Deok Im , Hyun Min Cho , Yongju Kwon , Bomi Kim , Sung-Jee Kim , Mihye Lim
- Applicant: Samsung Display Co., Ltd. , POSTECH Academy-Industry Foundation
- Applicant Address: KR Yongin-si KR Pohang-si
- Assignee: Samsung Display Co., Ltd.,POSTECH Academy-Industry Foundation
- Current Assignee: Samsung Display Co., Ltd.,POSTECH Academy-Industry Foundation
- Current Assignee Address: KR Yongin-si KR Pohang-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2016-0132288 20161012
- Main IPC: H01L21/02
- IPC: H01L21/02 ; B82Y40/00 ; B82Y30/00
Abstract:
A method of manufacturing a nanostructure includes: heating a mixed solution to a first temperature, the mixed solution including a solvent, a compound including indium, and an octadecylphosphonic acid; heating the mixed solution to a second temperature; injecting, after heating the mixed solution to the second temperature, a phosphine precursor into the mixed solution; and heating the mixed solution including the injected phosphine precursor to a third temperature.
Public/Granted literature
- US20180102249A1 NANOWIRE BUNDLE AND METHOD OF MANUFACTURING NANOSTRUCTURE Public/Granted day:2018-04-12
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