Invention Grant
- Patent Title: Substrate transfer apparatus and substrate transfer method
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Application No.: US15356869Application Date: 2016-11-21
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Publication No.: US10354900B2Publication Date: 2019-07-16
- Inventor: Akihiro Yazawa , Kenichi Kobayashi , Takahiro Nanjo , Hiroyuki Takenaka
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2015-246850 20151218
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/687
Abstract:
Disclosed is a substrate transfer apparatus including: a pair of hands facing with each other; an opening/closing mechanism configured to move the pair of hands symmetrically in an opening/closing direction; a driving unit configured to transmit a power to the opening/closing mechanism; and a controller configured to control an operation of the driving unit. The opening/closing mechanism includes: a rotating body configured to rotate depending on a moving amount of the pair of hands in the opening/closing direction, and a sensor configured to detect a rotating amount of the rotating body. The controller controls an operation of the driving unit based on a signal from the sensor.
Public/Granted literature
- US20170178940A1 SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD Public/Granted day:2017-06-22
Information query
IPC分类:
