- 专利标题: Low substrate leakage zener diode with modulated buried junction
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申请号: US15799783申请日: 2017-10-31
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公开(公告)号: US10355076B2公开(公告)日: 2019-07-16
- 发明人: Jun Cai , Binghua Hu
- 申请人: TEXAS INSTRUMENTS INCORPORATED
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 代理商 Rose Alyssa Keagy; Charles A. Brill; Frank D. Cimino
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/866 ; H01L29/66 ; H01L29/868 ; H01L21/761
摘要:
In some embodiments, an apparatus comprises a semiconductor layer doped with a first-type dopant, a first region doped with the first-type dopant, a second region doped with the first-type dopant, and a third region doped with a second-type dopant, where the second-type dopant is opposite the first-type dopant. The first, second, and third regions are non-overlapping and are formed in the semiconductor layer. The third region is positioned between the first region and the second region. The apparatus also comprises a plurality of Zener implant regions buried in the semiconductor layer and the third region, where each of the plurality of Zener implant regions is configured to generate a different pinch-off region.
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