Invention Grant
- Patent Title: Polycrystalline silicon thin film transistor and method of fabricating the same, and display apparatus
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Application No.: US15543726Application Date: 2016-07-25
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Publication No.: US10355107B2Publication Date: 2019-07-16
- Inventor: Jian Min , Xiaolong Li , Tao Gao , Liangjian Li , Zhengyin Xu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Intellectual Valley Law, P.C.
- International Application: PCT/CN2016/091533 WO 20160725
- International Announcement: WO2018/018356 WO 20180201
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/30 ; H01L27/12 ; H01L29/36 ; H01L29/66 ; H01L21/027 ; H01L29/786

Abstract:
The present application discloses a method of fabricating a polycrystalline silicon thin film transistor, the method including forming an amorphous silicon layer on a base substrate having a pattern corresponding to a polycrystalline silicon active layer of the thin film transistor; the amorphous silicon layer having a first region corresponding to a source electrode and drain electrode contact region in the polycrystalline silicon active layer and a second region corresponding to a channel region in the polycrystalline silicon active layer; forming a first dopant layer on a side of the second region distal to the base substrate; forming a second dopant layer on a side of the first region distal to the base substrate; and crystallizing the amorphous silicon layer, the first dopant layer, and the second dopant layer to form the polycrystalline silicon active layer, the polycrystalline silicon active layer being doped with a dopant of the first dopant layer in the second region and doped with a dopant of the second dopant layer in the first region during the step of crystallizing the amorphous silicon layer.
Public/Granted literature
- US20180331206A1 POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME, AND DISPLAY APPARATUS Public/Granted day:2018-11-15
Information query
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