Invention Grant
- Patent Title: Dielectric-enhanced metal coatings for MEMS tunable filters
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Application No.: US13964169Application Date: 2013-08-12
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Publication No.: US10359551B2Publication Date: 2019-07-23
- Inventor: Mark E. Kuznetsov , Ranko Galeb
- Applicant: Axsun Technologies, Inc.
- Applicant Address: US MA Billerica
- Assignee: Axsun Technologies, Inc.
- Current Assignee: Axsun Technologies, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Houstonhogle LLP
- Main IPC: G02B26/02
- IPC: G02B26/02 ; G02B5/28 ; G02B26/00 ; G01J3/26 ; H01S5/14 ; H01S3/08 ; H01S3/105 ; H01S5/022

Abstract:
The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example. When metal is added to the optical coating, the non-reflected portion of the light is absorbed by the metal and is not transmitted to the substrate or outside the cavity. Hybrid metal-dielectric coatings have broader and more uniform spectral reflection. Tunable lasers with performance enhanced by the hybrid metal-dielectric coatings can be used in optical coherence tomography and spectroscopic analysis applications.
Public/Granted literature
- US20150043002A1 Dielectric-Enhanced Metal Coatings for MEMS Tunable Filters Public/Granted day:2015-02-12
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