Invention Grant
- Patent Title: Oscillating structure with piezoelectric actuation, system and manufacturing method
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Application No.: US15465742Application Date: 2017-03-22
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Publication No.: US10365475B2Publication Date: 2019-07-30
- Inventor: Roberto Carminati , Massimiliano Merli , Sebastiano Conti
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102016000079604 20160728
- Main IPC: G02B27/01
- IPC: G02B27/01 ; G02B26/08 ; G02B27/14 ; G03B21/00 ; H01L41/053 ; H01L41/332

Abstract:
An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.
Public/Granted literature
- US20180031823A1 OSCILLATING STRUCTURE WITH PIEZOELECTRIC ACTUATION, SYSTEM AND MANUFACTURING METHOD Public/Granted day:2018-02-01
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