• Patent Title: Methods and systems for printing arrays of features
  • Application No.: US16061041
    Application Date: 2016-12-14
  • Publication No.: US10365566B2
    Publication Date: 2019-07-30
  • Inventor: Francis ClubeHarun Solak
  • Applicant: Francis ClubeHarun Solak
  • Applicant Address: CH Kirchdof
  • Assignee: Eulitha A.G.
  • Current Assignee: Eulitha A.G.
  • Current Assignee Address: CH Kirchdof
  • Agent Laurence Greenberg; Werner Stemer; Ralph Locher
  • International Application: PCT/IB2016/057623 WO 20161214
  • International Announcement: WO2017/103817 WO 20170622
  • Main IPC: G03F7/20
  • IPC: G03F7/20
Methods and systems for printing arrays of features
Abstract:
A method for printing a desired periodic pattern into a photosensitive layer on a substrate includes providing a mask bearing a periodic pattern whose period is a multiple of that of the desired pattern. The substrate is disposed in proximity to the mask, at least one beam is provided for illuminating the mask pattern to generate a transmitted light-field described by a Talbot distance. The layer is exposed to time-integrated intensity distributions in a number of sub-exposures by illuminating the mask pattern with the at least one beam while changing the separation between substrate and mask by at least a certain fraction of, but less than, the Talbot distance. The illumination or the substrate is configured relative to the mask for the different sub-exposures so that the layer is exposed to the same time-integrated intensity distributions that are mutually laterally offset by a certain distance and in a certain direction.
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