Invention Grant
- Patent Title: Hybrid III-V technology to support multiple supply voltages and off state currents on same chip
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Application No.: US15898958Application Date: 2018-02-19
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Publication No.: US10366892B2Publication Date: 2019-07-30
- Inventor: Josephine B. Chang , Isaac Lauer , Amlan Majumdar , Jeffrey W. Sleight
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent L. Jeffrey Kelly
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L21/762 ; H01L27/12 ; H01L21/84 ; H01L29/786

Abstract:
Techniques for forming dual III-V semiconductor channel materials to enable fabrication of different device types on the same chip/wafer are provided. In one aspect, a method of forming dual III-V semiconductor channel materials on a wafer includes the steps of: providing a wafer having a first III-V semiconductor layer on an oxide; forming a second III-V semiconductor layer on top of the first III-V semiconductor layer, wherein the second III-V semiconductor layer comprises a different material with an electron affinity that is less than an electron affinity of the first III-V semiconductor layer; converting the first III-V semiconductor layer in at least one second active area to an insulator using ion implantation; and removing the second III-V semiconductor layer from at least one first active area selective to the first III-V semiconductor layer.
Public/Granted literature
- US20180174844A1 Hybrid III-V Technology to Support Multiple Supply Voltages and Off State Currents on Same Chip Public/Granted day:2018-06-21
Information query
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