Invention Grant
- Patent Title: Vertical non-volatile memory device and method for fabricating the same
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Application No.: US15485579Application Date: 2017-04-12
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Publication No.: US10367003B2Publication Date: 2019-07-30
- Inventor: Shin-hwan Kang , Heon-kyu Lee , Kohji Kanamori , Jae-duk Lee , Jae-hoon Jang , Kwang-soo Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2016-0076838 20160620
- Main IPC: H01L31/112
- IPC: H01L31/112 ; H01L31/036 ; H01L29/76 ; H01L29/10 ; H01L27/11582 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L29/04 ; H01L29/16 ; H01L27/11573

Abstract:
A vertical non-volatile memory device includes a substrate including a cell region; a lower insulating layer on the substrate; a lower wiring pattern in the cell region having a predetermined pattern and connected to the substrate through the lower insulating layer; and a plurality of vertical channel layers extending in a vertical direction with respect to a top surface of the substrate in the cell region, spaced apart from one another in a horizontal direction with respect to the top surface of the substrate, and electrically connected to the lower wiring pattern. The memory device also includes a plurality of gate electrodes stacked alternately with interlayer insulating layers in the cell region in the vertical direction along a side wall of a vertical channel layer and formed to extend in a first direction along the horizontal direction.
Public/Granted literature
- US20170365616A1 VERTICAL NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-12-21
Information query
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