- 专利标题: Extreme ultraviolet light generating apparatus
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申请号: US15590238申请日: 2017-05-09
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公开(公告)号: US10374381B2公开(公告)日: 2019-08-06
- 发明人: Toru Suzuki , Takashi Suganuma , Akihiro Takayama , Yoshiaki Kurosawa
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 优先权: WOPCT/JP2014/083661 20141219
- 主分类号: H01S3/10
- IPC分类号: H01S3/10 ; H05G2/00 ; H01L21/30 ; H01S3/00 ; H01S5/00
摘要:
A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
公开/授权文献
- US20170250517A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS 公开/授权日:2017-08-31
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