Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus
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Application No.: US15590238Application Date: 2017-05-09
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Publication No.: US10374381B2Publication Date: 2019-08-06
- Inventor: Toru Suzuki , Takashi Suganuma , Akihiro Takayama , Yoshiaki Kurosawa
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/083661 20141219
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H05G2/00 ; H01L21/30 ; H01S3/00 ; H01S5/00

Abstract:
A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
Public/Granted literature
- US20170250517A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2017-08-31
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