Invention Grant
- Patent Title: Sacrificial alignment ring and self-soldering vias for wafer bonding
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Application No.: US15921563Application Date: 2018-03-14
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Publication No.: US10381330B2Publication Date: 2019-08-13
- Inventor: Justin Hiroki Sato , Bomy Chen , Walter Lundy
- Applicant: Silicon Storage Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Silicon Storage Technology, Inc.
- Current Assignee: Silicon Storage Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: DLA Piper LLP (US)
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L25/065 ; H01L23/00 ; H01L25/00

Abstract:
A method of bonding a first substrate to a second substrate, wherein the first substrate includes first electrical contacts on a top surface of the first substrate, and wherein the second substrate includes second electrical contacts on a bottom surface of the second substrate. The method includes forming a block of polyimide on the top surface of the first substrate, wherein the block of polyimide has a rounded upper corner, and vertically moving the top surface of the first substrate and the bottom surface of the second substrate toward each other until the first electrical contacts abut the second electrical contacts, wherein during the moving, the second substrate makes contact with the rounded upper corner of the polyimide causing the first and second substrates to move laterally relative to each other.
Public/Granted literature
- US20180286836A1 Sacrificial Alignment Ring And Self-Soldering Vias For Wafer Bonding Public/Granted day:2018-10-04
Information query
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