Invention Grant
- Patent Title: Methods for forming a string of memory cells and apparatuses having a vertical string of memory cells including metal
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Application No.: US14707749Application Date: 2015-05-08
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Publication No.: US10381363B2Publication Date: 2019-08-13
- Inventor: Fatma Arzum Simsek-Ege , Akira Goda , Durai Vishak Nirmal Ramaswamy
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L27/1157 ; H01L27/11524 ; H01L27/11529 ; H01L27/11556 ; H01L27/11582 ; H01L29/792 ; H01L29/66 ; H01L27/105 ; H01L29/423

Abstract:
A method for forming a string of memory cells, a memory device having a string of memory cells, and a system are disclosed. The string of memory cells can include a string of planar memory cells formed as recesses in each of a plurality of control gate material formed as a vertical stack of alternating insulator and control gate material. The recesses can be lined with a dielectric material and filled with a floating gate material. Metal nano-particles can be formed on a surface of the floating gate material and/or infused into the floating gate material.
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