Invention Grant
- Patent Title: Micro heating plate device and sensor having a micro heating plate device
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Application No.: US14917708Application Date: 2014-07-21
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Publication No.: US10383177B2Publication Date: 2019-08-13
- Inventor: Christoph Schelling , Richard Fix
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Suttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Suttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013218840 20130919
- International Application: PCT/EP2014/065589 WO 20140721
- International Announcement: WO2015/039786 WO 20150326
- Main IPC: H05B3/26
- IPC: H05B3/26 ; G01N27/12 ; H05B3/66

Abstract:
A micro-hotplate apparatus including a diaphragm carrier device; a diaphragm that at least in part spans at least one cavity embodied in the diaphragm carrier device; and at least one heating conductor disposed on and/or in the diaphragm, the micro-hotplate apparatus additionally encompassing at least one reflector element that is disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation emitted from the at least one heating conductor and/or from the diaphragm is reflectable at least in part back onto and/or into the diaphragm. A sensor having a micro-hotplate apparatus is also described.
Public/Granted literature
- US20160219649A1 MICRO HEATING PLATE DEVICE AND SENSOR HAVING A MICRO HEATING PLATE DEVICE Public/Granted day:2016-07-28
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