Invention Grant
- Patent Title: Separating device and separating method
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Application No.: US15956770Application Date: 2018-04-19
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Publication No.: US10384434B2Publication Date: 2019-08-20
- Inventor: Chen-Tsai Yang , Ko-Chin Yang , Shi-Chang Chen , Cheng-Yi Wang , Yen-Ting Wu
- Applicant: Industrial Technology Research Institute , Intellectual Property Innovation Corporation
- Applicant Address: TW Hsinchu TW Hsinchu
- Assignee: Industrial Technology Research Institute,Intellectual Property Innovation Corporation
- Current Assignee: Industrial Technology Research Institute,Intellectual Property Innovation Corporation
- Current Assignee Address: TW Hsinchu TW Hsinchu
- Agency: JCIPRNET
- Priority: TW106146205A 20171228
- Main IPC: B32B43/00
- IPC: B32B43/00 ; H01L51/00 ; B32B38/10

Abstract:
A separating device includes a separating unit and a crack front line adjusting unit. The separating unit is adapted to separate the flexible film and the substrate. During the process of separating the flexible film from the substrate, a crack front line is formed between a portion of the flexible film not separated from the substrate and a portion of the flexible film separated from the substrate. The crack front line adjusting unit is adapted to sense a relative displacement state of the flexible film and the substrate for determining a distribution of the crack front line, and is adapted to apply a down pressing force to the flexible film or the substrate and increase or decrease the down pressing force according to the relative displacement state, so as to adjust the distribution of the crack front line.
Public/Granted literature
- US20190061332A1 SEPARATING DEVICE AND SEPARATING METHOD Public/Granted day:2019-02-28
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