Invention Grant
- Patent Title: Plurality of electrodes on a substrate having different range of spacing
-
Application No.: US15476830Application Date: 2017-03-31
-
Publication No.: US10388730B2Publication Date: 2019-08-20
- Inventor: Jeng Ping Lu , Eugene M. Chow , David K. Biegelsen , Sourobh Raychaudhuri
- Applicant: Palo Alto Research Center Incorporated
- Applicant Address: US CA Palo Alto
- Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee Address: US CA Palo Alto
- Agency: Womble Bond Dickinson (US) LLP
- Agent Daniel E. Ovanezian
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/44 ; H01L29/06 ; B82Y30/00 ; B82Y40/00 ; H01L21/06 ; H01L31/0352 ; H01L23/00 ; B81C3/00
Abstract:
An electrode array including a substrate. The electrode array includes a first plurality of electrodes disposed above a first zone of the substrate, wherein the first plurality of electrodes has a first range of spacing. The electrode array further includes a second plurality of electrodes disposed above a second zone of the substrate, wherein the second plurality of electrodes has a second range of spacing that is less than the first range of spacing.
Public/Granted literature
- US20180282150A1 HIERARCHICAL MICRO ASSEMBLER SYSTEM Public/Granted day:2018-10-04
Information query
IPC分类:
